| 摘要 |
PROBLEM TO BE SOLVED: To prevent a damage of a semiconductor sensor over a long period when using the semiconductor sensor of an X-ray direct detection type which is a semiconductor sensor such as a CCD sensor, as an X-ray detector of an X-ray analyzer. SOLUTION: This X-ray analyzer has a sample stand 19 for supporting a sample S; an X-ray source 24 for generating an X-ray for irradiating the sample S; the semiconductor sensor 43 formed by aligning a plurality of semiconductor elements, for receiving the X-ray emitted from the sample S directly by the semiconductor elements; and an X-ray stopper 33 arranged in a low-angle domainγnear the diffraction angle of 0°which is a domain on the X-ray emission side of the sample S. When the semiconductor sensor 43 is carried into the domain of the low-angle domainγby 2θrotational movement, a direct beam of the X-ray from the X-ray source 24 is prevented from directly entering the semiconductor sensor 43 by the X-ray stopper 33. COPYRIGHT: (C)2006,JPO&NCIPI
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