发明名称 Optical image measuring apparatus
摘要 Provided is an optical image measuring apparatus capable of effectively receiving interference light, particularly an alternating current component thereof using a smaller number of photo sensors. The optical image measuring apparatus includes a polarizing plate for converting a light beam from a broad-band light source to linearly polarized light, a half mirror for dividing the light beam into signal light and reference light, a piezoelectric element for vibrating a reference mirror, a wavelength plate for converting the reference light to circularly polarized light, a polarization beam splitter for extracting two different polarized light components from interference light produced from the signal light and the reference light which are superimposed on each other by the half mirror, CCDs for detecting the two different polarized light components, and a signal processing portion for producing an image of an object to be measured based on the detected polarized light components. A frequency for intensity modulation of the light beam is synchronized with a beat frequency of the interference light. A frequency of vibration of the reference mirror is synchronized with the beat frequency of the interference light and an amplitude of vibration thereof is set to be equal to or smaller than a wavelength of the interference light.
申请公布号 US2006055939(A1) 申请公布日期 2006.03.16
申请号 US20050223928 申请日期 2005.09.13
申请人 KABUSHIKI KAISHA TOPCON 发明人 AKIBA MASAHIRO;CHAN KINPUI;FUKUMA YASUFUMI;OTSUKA HIROYUKI;TSUKADA HISASHI;YUMIKAKE KAZUHIKO
分类号 G01B11/02 主分类号 G01B11/02
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