| 摘要 |
PROBLEM TO BE SOLVED: To provide a microscopic device which allows a cantilever to be easily replaced and is capable of ensuring sufficient visibility and resolution of an optical image. SOLUTION: A holding mechanism 400 comprises a cantilever holding mechanism 400A and a mirror holding mechanism 400B. The cantilever holding mechanism 400A is provided so as to extend in a Z direction from under a holding mechanism holding part 11c. The cantilever holding mechanism 400A attachably and detachably holds a cantilever 100 by a lower end part thereof. The mirror holding mechanism 400B is provided so as to extend in an X direction from an inside surface 11x of a side wall part 11A. The mirror holding mechanism 400B attachably and detachably holds a mirror fixing member 450. A mirror 25 is fixed to the mirror fixing member 450. The cantilever holding mechanism 400A and the mirror holding mechanism 40B are separated from each other. COPYRIGHT: (C)2006,JPO&NCIPI
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