| 摘要 |
PROBLEM TO BE SOLVED: To provide a diaphragm pump device facilitating to clean a diaphragm and replace a part. SOLUTION: In the diaphragm pump device partitioning pressure medium existing in a drive chamber 11 of a drive source side member side 1 and pumped fluid flowing into a pressure chamber 23a of a diaphragm side member 21 from a supply source side 15 via a check valve member 41 by the diaphragm under a non-contact condition, the diaphragm side member attached to a cylinder 5 of the drive source side member consists of a negative pressure chamber block 22 attached to a cylinder, a pressure chamber block 23 joined to the negative pressure chamber block as one unit via a connector 24 in such a manner that the same can be freely opened and closed and be separated, and the diaphragm separatably provided in an inner space of the pressure chamber block and the negative pressure block via a fixing means 25. COPYRIGHT: (C)2006,JPO&NCIPI
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