| 摘要 |
PROBLEM TO BE SOLVED: To provide a process for manufacturing a liquid ejection head in which a vibrating plate can be formed in a thin film and micronized, and durability of the vibrating plate can be enhanced. SOLUTION: The process for manufacturing a liquid ejection head comprising a pressure generation chamber 115 communicating with a liquid ejection opening 119, piezoelectric elements 108-110 provided in correspondence with the pressure generation chamber 115, and a vibrating plate 111 provided between the pressure generation chamber 115 and the piezoelectric elements 108-110 comprises a step for preparing a substrate 101 having a trench (recess) 104 in one major surface of a planar substrate 101, a step for forming the piezoelectric elements 108-110 in the trench (recess) 104, a step for forming a planar vibrating plate 111 on one major surface of the planar substrate 101 and on the piezoelectric elements 108-110, a step for forming the pressure generation chamber 115 on the vibrating plate 111, and a step for removing at least the periphery of the piezoelectric elements 108-110 on the substrate 101. COPYRIGHT: (C)2006,JPO&NCIPI
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