| 摘要 |
PROBLEM TO BE SOLVED: To provide a chuck table capable of securing high face precision of a joint face between a holding member holding a workpiece and a base. SOLUTION: This chuck table comprises a base having a suction passage communicated with a suction means, and a holding member detachably mounted on a top face of the base and sucking and holding a workpiece. The holding member has a suction part with an opened pore on a holding face sucking and holding the workpiece, and a supporting part surrounding the holding face. A communication passage communicating the pore with the suction passage is formed at a supporting part. The base and the holding member are jointed to each other only at an outer periphery, and the suction passage and the communication passage are opened on the outer periphery at positions opposite to each other. COPYRIGHT: (C)2006,JPO&NCIPI |
