发明名称 |
Carbon nanotubes and method of manufacturing same, electron emission source, and display |
摘要 |
The present invention provides carbon nanotubes perpendicularly and densely deposited over a wide area of a substrate. The carbon nanotubes are manufactured by supplying alternating-current power at a specific frequency between an anode and a cathode disposed in a reactor, and causing plasma to be generated between the anode and the cathode by introducing mixed gas containing an aliphatic hydrocarbon having 1-5 carbon atoms and hydrogen or mixed gas containing an aromatic hydrocarbon and hydrogen. The substrate is disposed between the anode and the cathode and held at a distance two times or less of the mean free path of a hydrocarbon cation from the anode.
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申请公布号 |
US2006054491(A1) |
申请公布日期 |
2006.03.16 |
申请号 |
US20050267314 |
申请日期 |
2005.11.07 |
申请人 |
FUTABA CORPORATION |
发明人 |
HIRAOKA HIROYUKI;SHIRATORI YOSUKE;YAMAMOTO MASAHIDE;ITOH SHIGEO;NAWAMAKI KENJI |
分类号 |
H01J1/30;H05F3/00;C01B15/01;C01B31/02;C23C16/26;C23C16/44;C23C16/509;D01F9/127;H01J9/02 |
主分类号 |
H01J1/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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