发明名称 |
Pupil improvement of incoherent imaging systems for enhanced CD linearity |
摘要 |
A pattern generator may include an electromagnetic radiation source and an optical system. The electromagnetic radiation source may emit electromagnetic radiation to create a pattern on a workpiece. The optical system may include an optical path for the electromagnetic radiation emitted from the electromagnetic radiation source and may be configured such that an apodization of the electromagnetic radiation is sufficient to optimize a critical dimension linearity for the created pattern.
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申请公布号 |
US2006054781(A1) |
申请公布日期 |
2006.03.16 |
申请号 |
US20050209040 |
申请日期 |
2005.08.23 |
申请人 |
SANDSTROM TORBJORN;IVONIN IGOR |
发明人 |
SANDSTROM TORBJORN;IVONIN IGOR |
分类号 |
H01L27/00 |
主分类号 |
H01L27/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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