发明名称 Cross-linked elastomer composition and formed product composed of such cross-linked elastomer composition
摘要 There is provided a crosslinkable elastomer composition, which has small decrease in weight to all of high concentration F radical irradiation, O<SUB>2 </SUB>plasma treatment and fluorine plasma treatment which are conducted in a semiconductor manufacturing process and significant plasma resistance, and a molded article comprising the crosslinkable elastomer composition.
申请公布号 US2006058448(A1) 申请公布日期 2006.03.16
申请号 US20050541753 申请日期 2005.07.08
申请人 DAIKIN INDUSTRIES LTD. 发明人 HIGASHINO KATSUHIKO;NOGUCHI TSUYOSHI
分类号 D06M15/277;C08K3/16;C08L27/12;C08L77/10;C08L79/08;C09K3/10 主分类号 D06M15/277
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