| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a solid oxide fuel cell excellent in thermal shock resistance and mechanical strength of which cell element part is hard to break and capable of being integrated at high density and its manufacturing method. <P>SOLUTION: The solid oxide fuel cell consists of a cell element part provided in a pore of a metal support body. Porous conductive materials are provided on the metal support body and air poles are connected with each other and fuel poles are connected with each other. Sum of thickness of the metal support body and the porous conductive materials provided at upper and lower faces are 100 to 300 μm. The distance between pitches of adjoining cell elements is 10 to 1,000 μm. The porous conductive materials are connected on the metal support body and are adopted selective patterning in the pore to form the cell element part and the solid oxide fuel cell is obtained. The selective patterning method includes a DC heating evaporation method, an ion beam evaporation method, a reactive ion beam evaporation method, a two-pole sputtering method, a magnetron sputtering method, a reactive sputtering method, a three-pole sputtering method, an ion beam sputtering method, an ion plating method, a hollow cathode beam method, an ion beam injection method and a plasma CVD method and the like. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
