| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for treating an oxide crystal, by which the surface of the oxide crystal can be desirably flattened, and the oxide crystal. SOLUTION: A prescribed crystal surface (e.g. (110) plane in the perovskite-type crystal structure) constituting the surface of a transition metal oxide crystal (e.g. SrTiO<SB>3</SB>crystal) is made a surface to be treated. Then, the crystal surface is flattened in an atomic level by performing a first stage heat treatment under treating conditions of a first temperature and a first oxygen amount. Further, the insulating property of the crystal is recovered by filling the deficiency of oxygen in the crystal produced in the first stage heat treatment, while keeping the flattened state of the crystal surface by performing a second stage heat treatment under conditions of a second temperature lower than the first temperature and of a second oxygen amount larger than the first oxygen amount. COPYRIGHT: (C)2006,JPO&NCIPI
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