| 摘要 |
A showerhead assembly for used in a manufacturing apparatus for a display substrate is provided in the present invention. The showerhead assembly includes a backing plate having a gas inflow, a showerhead having a plurality of gas injection holes, a plurality of first connectors connecting the showerhead and the backing plate at edge portions thereof, and a plurality of second connectors connecting the showerhead and the backing plate in middle portions thereof.
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