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申请公布号
JP2006509363(A)
申请公布日期
2006.03.16
申请号
JP20040558349
申请日期
2003.06.11
申请人
发明人
分类号
H01L21/205;C23C16/458;C23C16/46;C30B25/10;C30B25/12;C30B31/14;F27B14/06;H01L21/00;H01L21/324;H01L21/683;H01L21/687;H05B6/02
主分类号
H01L21/205
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