| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a particle beam scanning equipment including a scanner, an emission detector and a DC amplifier, and a method for generating a video signal using the scanner. <P>SOLUTION: The scanning equipment includes the scanner, the emission detector and the DC amplifier, of which the amplifier can operate in order to amplify a signal generated from the detector to generate the video signal. The scanning equipment further includes a controller which can operate to guide a beam in response to a sample or to decide when the beam is guided, thereby, an actual video signal and a desired video signal can be compared with each other. The controller, furthermore, can operate in order to compare the actual video signal with the desired video signal and also to adjust a DC offset of the amplifier so as to reduce a difference between the video signals. Moreover, the method for generating the video signal using the scanning equipment is provided. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
