| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitance type pressure sensor adapted for high-precision temperature compensation and easy calibration after installation. SOLUTION: The capacitance type pressure sensor comprises a measuring electrode 11 facing a first diaphragm 21 which separates a pressure standard chamber 1 set at a predetermined pressure and a pressure measuring chamber 2 to measure the pressure of the pressure measuring chamber 2 from a first capacitance between the first diaphragm 21 and the measuring electrode 11. The pressure sensor is provided with a reference electrode 12 for performing temperature compensation for environmental temperature changes and a second diaphragm 22 facing the reference electrode 12. The pressure of a first gap on the side of the reference electrode and the pressure of a second gap on the other side across the second diaphragm 22 are set to be substantially the same. The pressure of the pressure measuring chamber is determined by correcting the first capacitance with a second capacitance between the reference electrode and the second diaphragm. COPYRIGHT: (C)2006,JPO&NCIPI
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