| 摘要 |
PROBLEM TO BE SOLVED: To provide a motor-driven fluid controller capable of preventing each component from corrosion, even if a corrosive fluid is used as the fluid, that is easily installed in the inside or the like of a semiconductor manufacturing device, easy to connect to piping and wiring, and capable of controlling a flow rate, even if the flowing-in fluid is pulsating. SOLUTION: This fluid controller has a motor-driven control valve comprising an electric type driving part 11 and a flow control part 5, a flowmeter sensor part 4, having ultrasonic oscillators 18, 19 for receiving ultrasonic waves emitted from the ultrasonic oscillator 18 and the ultrasonic oscillator 19 for emitting ultrasonic waves into the fluid, and for outputting signals to a flowmeter amplifier part 9, and the flowmeter amplifier part 9 for computing the flow rate, based on the signal from the flowmeter sensor part 4, and a control part 10 for regulating the opening of the motor-driven control valve, based on a flow rate value computed by the flowmeter amplifier part 9 to conduct feedback control, and one electric module 7 provided at least with the flowmeter amplifier part 9, the control part 10 and the electric type driving part 11 is provided in a casing 8. COPYRIGHT: (C)2006,JPO&NCIPI
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