MICRO ELECTROMECHANICAL ELEMENT, OPTICAL MICRO ELECTROMECHANICAL ELEMENT, LIGHT MODULATION ELEMENT AND LASER DISPLAY

摘要

PROBLEM TO BE SOLVED: To optimize the beam inclination amount while restraining the bending of a beam even if the beam is made micro-sized in a micro electromechanical element requiring an inclination in the surface shape of the beam. SOLUTION: A lower electrode 43 is provided with a beam 45 opposite thereto through a space 44 and supported at the end parts, and the beam 45 is provided with a step 51 for causing inclination in the width direction of the beam. The step 51 is provided with a means 52 for relaxing the stress of a triple point. COPYRIGHT: (C)2006,JPO&NCIPI