发明名称 |
VARIABLE CAPACITANCE ELEMENT |
摘要 |
A variable capacitance element includes a movable element provided above a substrate using supporting portions and support beams so as to be displaced from the substrate. An insulating film and a movable electrode are provided on a conductor facing surface of the movable element. A driving electrode is arranged to displace the movable element, between a signal cutoff position and a signal passage position, whereby a high frequency signal transmitted through a transmission line is cut off or allowed to pass. The insulating film uses compressive stress to warp the movable element and the movable electrode in a direction of warping in a convex form toward the transmission line, and maintains this warping direction.
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申请公布号 |
US2006056132(A1) |
申请公布日期 |
2006.03.16 |
申请号 |
US20050535861 |
申请日期 |
2005.05.20 |
申请人 |
YOSHIDA KOICHI;OGUCHI TAKAHIRO;KONAKA YOSHIHIRO |
发明人 |
YOSHIDA KOICHI;OGUCHI TAKAHIRO;KONAKA YOSHIHIRO |
分类号 |
H01G5/14;H01G5/013;H01G5/18;H01H59/00;H01P1/12 |
主分类号 |
H01G5/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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