| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To dissolve the mismatch of recipes and to eliminate the useless use of a storage area. <P>SOLUTION: In a semiconductor manufacturing system provided with a block computer 10 connected to a plurality of semiconductor manufacturing devices A1-An and constituted so as to hold the recipes for each of the A1-An in both of the A1-An and the block computer 10 and manage them in the block computer 10, when an operator changes the recipe of the A1, the block computer 10 sucks up the recipe of the A1 and changes the recipes of the A2 and A3 in the same group as the A1. Even in the case that the recipe is changed on the side of the semiconductor manufacturing device, since the recipes of the semiconductor manufacturing devices in the same group can be automatically changed, the mismatch of the recipes is prevented and the generation of defective lots is prevented. Since excessive storage in the block computer is prevented, the useless use of the storage area is eliminated. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
