| 摘要 |
PROBLEM TO BE SOLVED: To provide a dicing device which improves contamination removal power and is capable of effectively removing contamination even without dedicated cleaning facility. SOLUTION: A dicing device 10 comprises a spouting member 4 for linearly spouting liquid mixed with high-pressure gas wider than the diameter of a work and at least at one end of a work feeding stroke, the spouting member 4 is disposed at a position so as to spout the liquid over the work. Thus, the accelerated liquid is supplied to the work 7 under machining so as to wash away contamination that is generated during machining. COPYRIGHT: (C)2006,JPO&NCIPI |
