| 摘要 |
PROBLEM TO BE SOLVED: To provide an XY-positioning device which can be composed of an inexpensive XY-position detector superior in environmental durability, which is not restricted by the movable range of an XY-slider and which can drive the plurality of the XY-sliders. SOLUTION: In the XY-positioning device composed of a platen 100 formed like a grid along the orthogonal X-axis direction and the Y-axis direction, the XY-slider 1 disposed opposite the platen 100 via a gap, and an X-armature and a Y-armature for generating thrust for the XY-slider 1 with respect to the X-axis direction and the Y-axis direction, respectively, there are provided: a planar encoder consisting of a planar XY-scale 104 disposed on the platen 100 and having the divisions for detecting the X-axis position and the Y-axis position; and the XY-position detector 8 disposed on the XY-slider 1 for detecting the divisions of the XY-scale 104. The positioning of the XY-slider is performed on the basis of the positional information on the X-axis position and the Y-axis position obtained by the XY-position detector. COPYRIGHT: (C)2006,JPO&NCIPI |
