| 摘要 |
PROBLEM TO BE SOLVED: To meet the demand not only of a piezoelectric element structure exhibiting excellent durability and piezoelectric characteristics, but also of manufacturing a high definition inkjet recording head arranged with nozzles at high density inexpensively with high yield in which machining of liqud chamber is simplified. SOLUTION: In the inkjet recording head where a vibrating plate and a piezoelectric element for ejecting ink are formed in an ink channel structure having a pressure generating chamber connected with an ink sump through a communication hole, the piezoelectric element is formed on a single crystal silicon film formed on an Si substrate through an insulating film, and the single crystal silicon film is exposed on the side facing the back space of the vibrating plate of the piezoelectric element through the insulating film. COPYRIGHT: (C)2006,JPO&NCIPI
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