发明名称 Structures for supporting vibrators and devices for measuring physical quantities
摘要 A structure for supporting a vibrator 1 is provided. The structure comprises a substrate 12 and bonding wires 14 A, 14 B fixed to the substrate 12 and connected with the vibrator 1 . The vibrator 1 is supported with the bonding wires so that the vibrator 1 is not directly contacted with the substrate 12 . "fd" and "fw" satisfy the following formula (1). "fd" represents a resonance frequency of a driving vibration mode of the vibrator and "fw" represents a characteristic frequency of a vibration mode of the bonding wire at room temperat
申请公布号 US2006053883(A1) 申请公布日期 2006.03.16
申请号 US20050214455 申请日期 2005.08.29
申请人 SEIKO EPSON CORPORATION 发明人 HAYASHI SHIGEKI;KIKUCHI TAKAYUKI;KINOSHITA YUSUKE
分类号 G01P1/04;F16M13/00;G01P9/04 主分类号 G01P1/04
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