发明名称 |
Vorrichtung zur Entfernung von Debris zur Verwendung in einer Röntgenquelle |
摘要 |
A debris removing system for preventing debris, being scattered from an X-ray source, the debris removing system including an attracting unit disposed between a light emission point of the X-ray source and the optical system, for attracting debris, the attracting unit having an attracting surface parallel or approximately parallel to an axis passing through the light emission point. The debris removing system further includes a rotation unit for rotating the attracting unit about the axis. This debris removing system assures a superior debris removing effect and a good EUV light utilization efficiency, being compatible with each other. <IMAGE> |
申请公布号 |
DE60204389(T2) |
申请公布日期 |
2006.03.16 |
申请号 |
DE2002604389T |
申请日期 |
2002.07.03 |
申请人 |
CANON K.K., TOKIO/TOKYO |
发明人 |
OGUSHI, NOBUAKI;WATANABE, YUTAKA;MIYAKE, AKIRA |
分类号 |
G03F1/16;H05G2/00;A61B5/117;G03F1/22;G03F1/24;G03F7/20;H01L21/027 |
主分类号 |
G03F1/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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