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发明名称
Ionensensitive Halbleitersensoren mit HEMT-Struktur
摘要
申请公布号
DE10062044(B4)
申请公布日期
2006.03.16
申请号
DE20001062044
申请日期
2000.12.13
申请人
EADS DEUTSCHLAND GMBH
发明人
AMBACHER, OLIVER;MUELLER, GERHARD;NEUBERGER, RALPH;STUTZMANN, MARTIN
分类号
H01L29/778;G01N27/414;H01L29/772
主分类号
H01L29/778
代理机构
代理人
主权项
地址
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