| 摘要 |
A three-axis acceleration sensor having a simple construction is provided for improving shock resistance without lowering sensor sensitivity. An acceleration sensor for detecting acceleration in three orthogonal directions includes an electrode substrate (5) having fixed electrodes corresponding to three axes, respectively, a diaphragm (2) having one surface thereof opposed to the fixed electrodes acting as a movable electrode, and a weight (1) mounted centrally of the other surface of the diaphragm. Acceleration is detected based on variations in capacitance between the fixed electrodes and diaphragm (2). The electrode substrate (5) has an electret layer (4) formed to cover surfaces of the fixed electrodes. |
