发明名称 |
Surface acoustic wave device |
摘要 |
<p>A surface acoustic wave device is provided which includes interdigital electrodes mainly containing Cu and has significantly improved power resistance. A surface acoustic wave device 1 includes a piezoelectric substrate 2 and interdigital electrodes 3 formed thereon. The interdigital electrodes 3 each include a main electrode layer 3a formed of Cu or an alloy mainly containing Cu, and an adhesive layer 3b disposed between the main electrode layer 3a and the piezoelectric substrate 2 and mainly contains NiCr. Alternatively, the adhesive layer 3b mainly contains Ti and has a thickness of 18 to 60 nm.</p> |
申请公布号 |
EP1635458(A1) |
申请公布日期 |
2006.03.15 |
申请号 |
EP20040725791 |
申请日期 |
2004.04.05 |
申请人 |
MURATA MANUFACTURING CO., LTD. |
发明人 |
HADA, TAKUO;NAKAO, TAKESHI;KADOTA, MICHIO;NAKAGAWARA, OSAMU |
分类号 |
H03H9/145;H03H9/02;H03H9/25;H03H9/64;(IPC1-7):H03H9/145 |
主分类号 |
H03H9/145 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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