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发明名称
MICROWAVE PLASMA GENERATOR
摘要
申请公布号
EP1449233(B1)
申请公布日期
2006.03.15
申请号
EP20020770115
申请日期
2002.10.25
申请人
ACCENTUS PLC
发明人
GILLESPIE, ROBERT FREW;HALL, STEPHEN IVOR;SHAWCROSS, JAMES TIMOTHY
分类号
H01J37/32;H05H1/46;B01J19/08
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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