发明名称 |
Actuator with piezo-electric element, method for producing the same and ink-jet recording head |
摘要 |
Lower electrodes are disposed independently of each other for respective ink cavities through a silicon oxide film on a silicon substrate. PZT films and upper electrodes are disposed on the respective lower electrodes, and then an interlayer insulating film or a passivation film is disposed on top of the whole layer. <IMAGE> |
申请公布号 |
EP0841165(B1) |
申请公布日期 |
2006.03.15 |
申请号 |
EP19970119438 |
申请日期 |
1997.11.06 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
HASHIZUME, TSUTOMU;MATSUZAWA, AKIRA |
分类号 |
B41J2/045;B41J2/14;B41J2/055;B41J2/135;B41J2/145;B41J2/16;H01L41/09;H01L41/22 |
主分类号 |
B41J2/045 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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