发明名称 |
NOZZLE CLOGGING DETECTION DEVICE, LIQUID DROPLET DISCHARGING DEVICE, ELECTROOPTICAL DEVICE, MANUFACTURING METHOD OF ELECTROOPTICAL DEVICE, AND ELECTRONIC APPARATUS |
摘要 |
A head 20 , controlled by control unit 10 , ejects a droplet 22 through each nozzle in nozzle group 2 . Measuring means 33 electronically measures a resonance frequency of crystal oscillator 31 and outputs the measured resonance frequency to control unit 10 . Control unit 10 determines whether or not a nozzle is clogged on the basis of the measurement result of a resonance frequency of the crystal oscillator before and after the ejection of droplet 22. |
申请公布号 |
KR100559807(B1) |
申请公布日期 |
2006.03.15 |
申请号 |
KR20030094508 |
申请日期 |
2003.12.22 |
申请人 |
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发明人 |
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分类号 |
B41J2/01;B05C11/00;B41J2/165;H01L21/027;H01L41/08;H01L41/09;H05B33/10 |
主分类号 |
B41J2/01 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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