发明名称 NOZZLE CLOGGING DETECTION DEVICE, LIQUID DROPLET DISCHARGING DEVICE, ELECTROOPTICAL DEVICE, MANUFACTURING METHOD OF ELECTROOPTICAL DEVICE, AND ELECTRONIC APPARATUS
摘要 A head 20 , controlled by control unit 10 , ejects a droplet 22 through each nozzle in nozzle group 2 . Measuring means 33 electronically measures a resonance frequency of crystal oscillator 31 and outputs the measured resonance frequency to control unit 10 . Control unit 10 determines whether or not a nozzle is clogged on the basis of the measurement result of a resonance frequency of the crystal oscillator before and after the ejection of droplet 22.
申请公布号 KR100559807(B1) 申请公布日期 2006.03.15
申请号 KR20030094508 申请日期 2003.12.22
申请人 发明人
分类号 B41J2/01;B05C11/00;B41J2/165;H01L21/027;H01L41/08;H01L41/09;H05B33/10 主分类号 B41J2/01
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