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发明名称
REACTIVE ION ETCHING DEVICE
摘要
申请公布号
JPH01306583(A)
申请公布日期
1989.12.11
申请号
JP19880137069
申请日期
1988.06.03
申请人
JAPAN SYNTHETIC RUBBER CO LTD
发明人
YAMADA KEIICHI;KOSHIBA MITSUNOBU;FURUWATARI YUUJI;HARITA YOSHIYUKI
分类号
C23F4/00;H01L21/302;H01L21/3065
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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