SYSTEM FOR DETECTING VERY SMALL PARTICLE WITHIN LOW PRESSURE ENVIRONMENT,申请号JP19880269612-传众专利搜索

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发明名称	SYSTEM FOR DETECTING VERY SMALL PARTICLE WITHIN LOW PRESSURE ENVIRONMENT
摘要
申请公布号	JPH0235334(A)	申请公布日期	1990.02.05
申请号	JP19880269612	申请日期	1988.10.27
申请人	HAI IIRUDO TECHNOL INC	发明人	PIITAA JII BOODEN
分类号	G01N15/14;G01N15/02;G01N15/10	主分类号	G01N15/14
代理机构		代理人
主权项
地址

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