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发明名称
AN APPARATUS FOR TRANSPORTING AN ELECTRICALLY CONDUCTIVE WAFER
摘要
申请公布号
EP0287838(A3)
申请公布日期
1990.07.18
申请号
EP19880104776
申请日期
1988.03.24
申请人
FUJITSU LIMITED
发明人
MACHIDA, AKIRA
分类号
B65G54/02;B65G49/07;H01L21/67;H01L21/677;(IPC1-7):H01L21/00
主分类号
B65G54/02
代理机构
代理人
主权项
地址
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