| 摘要 |
In an electrostatically operated device in which on the bottom surface side and the top surface side of a movable plate-like electrode are disposed a stationary electrode substrate (8) and a second stationary plate-like electrode (40) substantially in parallel with the movable plate-like electrode (2), the movable plate-like electrode is maintained at a position that is away by a first predetermined distance from the stationary electrode substrate and by a second predetermined distance from the second stationary plate-like electrode when any drive voltage is not applied to the second stationary plate-like electrode and to the stationary electrode substrate. In operation, a drive voltage more than or less than the pull-in voltage is applied to the second stationary plate-like electrode or the stationary electrode substrate, thereby to drive electrostatically the movable plate-like electrode toward the second stationary plate-like electrode or the stationary electrode substrate. |
