发明名称 Wafer test apparatus including optical elements and method of using the test apparatus
摘要 Wafer-level testing is performed on an electronic device to be used in an optical communications system. An optical test signal is generated and is provided to a first photo detector. An electrical output of the first photo detector is supplied to the electronic device on the wafer. An electrical output from the electronic device on the wafer is used to drive a light source. An optical output of the light source is supplied to a second photo detector and an electrical signal output from the second photo detector is examined.
申请公布号 US7012440(B2) 申请公布日期 2006.03.14
申请号 US20040791067 申请日期 2004.03.02
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 FENG KAI DI
分类号 G01R31/302;G01R31/28;H01L21/66;H04B10/08;H04B10/155 主分类号 G01R31/302
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