Apparatus and method for carrying substrate

摘要

A substrate carrying device reduces time necessary for conducting changing work for changing the types of flat panel displays or the like. A substrate support member ( 10 ) has a support body ( 11 ) provided with an outer peripheral part ( 11 a), which is joined to an inner peripheral part ( 21 b) of an extension support member ( 20 ) to connect the substrate support member ( 10 ) to the extension support member ( 20 ). Only by the substrate support member ( 10 ) is used for supporting a small glass substrate ( 41 ) to carry the small glass substrate ( 41 ). A combination of the substrate support member ( 10 ) and the extension support member ( 20 ) is used for supporting a large glass substrate ( 41' ) to carry the large glass substrate ( 41' ).