发明名称
摘要 PURPOSE:To easily operate a heating furnace and to improve its safety by providing the heating furnace and a holding device which guides and holds a reaction pipe to confirm a swing condition of the reaction pipe before inserting the reaction pipe into this heating furnace. CONSTITUTION:Before a reaction pipe 3 is inserted into a heating furnace 1, it is suspended by a suspender 4, its bottom is placed on a falling preventive plate 55, and it is passed through an opening of a guide plate 54. The reaction pipe 3 is a little lifted up and rotated to confirm its swing condition. After the falling preventive plate 55 is slided and rotated to open a hole, the reaction pipe 3 is lowered to a predetermined position of a core pipe 12 of the heating furnace 1. There is the most proper position for an installation position in the heating furnace 1 for this reaction pipe 3, and this positioning is confirmed by a scale and a supporting device 21. While the reaction pipe 3 is rotated, it is slowly lowered in the heating furnace 1.
申请公布号 JPH0311088(B2) 申请公布日期 1991.02.15
申请号 JP19850002928 申请日期 1985.01.11
申请人 CHINO CORP 发明人 HISHIKARI ISAO;SAKAINO YASUSHI
分类号 H01L21/205;H01L21/22 主分类号 H01L21/205
代理机构 代理人
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