Contrast based resolution enhancing technology

摘要

A contrast-base resolution enhancing technology (RET) receives an indication of an edge fragment in a photolithographic design. The edge fragment has a tag classification that defines a contrast of the edge fragment. The contrast-based RET applies a resolution enhancement to the edge fragment based on the tag classification. The resolution enhancement introduces an additional feature in the photolithographic design. The additional feature changes the contrast of the edge fragment.