发明名称 |
Coaxial waveguide microstructures and methods of formation thereof |
摘要 |
Provided are coaxial waveguide microstructures. The microstructures include a substrate and a coaxial waveguide disposed above the substrate. The coaxial waveguide includes: a center conductor; an outer conductor including one or more walls, spaced apart from and disposed around the center conductor; one or more dielectric support members for supporting the center conductor in contact with the center conductor and enclosed within the outer conductor; and a core volume between the center conductor and the outer conductor, wherein the core volume is under vacuum or in a gas state. Also provided are methods of forming coaxial waveguide microstructures by a sequential build process and hermetic packages which include a coaxial waveguide microstructure.
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申请公布号 |
US7012489(B2) |
申请公布日期 |
2006.03.14 |
申请号 |
US20040793574 |
申请日期 |
2004.03.04 |
申请人 |
ROHM AND HAAS ELECTRONIC MATERIALS LLC |
发明人 |
SHERRER DAVID W.;FISHER JOHN J. |
分类号 |
H01P3/06;H01P11/00;H05K1/02;H05K3/46 |
主分类号 |
H01P3/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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