TARGET MOVING TYPE SPUTTERING DEVICE,申请号JP19890300287-传众专利搜索

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发明名称	TARGET MOVING TYPE SPUTTERING DEVICE
摘要
申请公布号	JPH03158461(A)	申请公布日期	1991.07.08
申请号	JP19890300287	申请日期	1989.11.16
申请人	FUJITSU LTD;KYUSHU FUJITSU ELECTRON:KK	发明人	OKADA KOICHI;HASHIGUCHI TOSHIFUMI
分类号	C23C14/34	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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