发明名称
摘要 <p>PURPOSE: Aluminium removing chemical-solutions are provided to analyze exactly the existence and shape of contaminants by removing selectively an aluminium pad alone without the damage of the contaminants. CONSTITUTION: Aluminium removing chemical-solutions contain H3PO4, HNO3, CH3COOH and HO(CH2)2OH. The moll rate for H3PO4: HNO3: CH3COOH: HO(CH2)2OH is 1.1: 1: 0.1: 0.2. A sample is dipped in the chemical-solutions at a room temperature for 10 minutes. The moll rate has a variable range of -10 % to +10 %.</p>
申请公布号 KR100559992(B1) 申请公布日期 2006.03.13
申请号 KR20030006459 申请日期 2003.01.30
申请人 发明人
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
主权项
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