| 摘要 |
FIELD: measuring equipment, namely, devices for measuring by means of scanning probing microscope of relief, linear dimensions, physical characteristics of surface and distribution of these characteristics in the volume of object by cutting thin layers of object with following research along new surfaces of object. ^ SUBSTANCE: scanning probing microscope, combined with device for cutting thin layers of object, contains body with three-coordinate piezo-scanner positioned on it with probe holder and probe, knife, object holder, and also device for shifting position of probe relatively to object. Object holder is mounted on mechanism for its movement relatively to knife along curvilinear trajectory with shifting for thickness of cut. Mechanism for mating device for positional movement of probe with object holder is made in form of supporting plate, positioned in movement plane by two coordinates of device for positional movement of probe. Supporting plate has three supports. One height-adjustable support is mounted in vertical plane, passing along axis of probe-object system. Two rotary supports are distanced relatively to this plane. Two rotary supports may be made in form of pins with axes, held on the body of microscope. Supporting plate may be capable of shifting along figure grooves in each one of rotary supports. ^ EFFECT: increased precision of measurements and substantially expanded functional capabilities. ^ 1 dwg |
