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发明名称
METHOD OF IMPROVING STI PROCESS CHARACTERISTICS BY PLASMA PROCESS
摘要
申请公布号
KR100557943(B1)
申请公布日期
2006.03.10
申请号
KR20000037115
申请日期
2000.06.30
申请人
发明人
分类号
H01L21/76;H01L21/316;H01L21/318;H01L21/762
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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