METHOD FOR MANUFACTURING A SHALLOW TRENCH ISOLATION LAYER,申请号KR20030077966-传众专利搜索

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发明名称	METHOD FOR MANUFACTURING A SHALLOW TRENCH ISOLATION LAYER
摘要
申请公布号	KR100559519(B1)	申请公布日期	2006.03.10
申请号	KR20030077966	申请日期	2003.11.05
申请人		发明人
分类号	H01L21/762	主分类号	H01L21/762
代理机构		代理人
主权项
地址

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