| 摘要 |
FIELD: coating applying systems, namely apparatuses for deposition of coatings in vacuum, possibly in electrography, machine engineering, radio electronics and other branches of industry. ^ SUBSTANCE: apparatus includes vacuum chamber; temperature -sensitive resistor base evaporator for evaporating easy-to-melt metals and alloys; device for mounting and rotating substrate, magnetron; laser irradiation source for irradiating and evaporating hard-to-melt ferromagnetic and non-ferromagnetic metals and alloys; crucible for evaporating metals and alloys of above mentioned types. Vacuum chamber is provided with window for laser irradiation. Invention allows apply different type coatings in the same working chamber. ^ EFFECT: lowered cost of process for applying coatings onto articles, large assortment of composition coatings with different functions. ^ 1 dwg |
