| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical detector which is applicable for the microfabrication of every pixels and superior in optical detection sensitivity, and to provide its manufacturing method. SOLUTION: Optical detectors 4 are formed on a plurality of projecting parts 2 which are arranged like a two-dimensional array on one surface 20a of a semiconductor substrate 20, and they generate potential corresponding to the intensity of incident light. In addition, wirings 6 and switches 7 as reading parts are formed in recesses 3a formed among the projecting parts 2 along one arrangement direction of the two-dimensional array. The wirings 6 read out potential generated from the optical detectors 4, and the switches 7 electrically connect the optical detectors 4 and the wirings 6 with each other. COPYRIGHT: (C)2006,JPO&NCIPI
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