| 摘要 |
PROBLEM TO BE SOLVED: To provide a microchemical chip capable of being manufactured at a low cost with slight contamination of impurities and adopting various kinds of mounting configurations. SOLUTION: The microchemical chip is provided with a first flow passage 4 formed from a cavity 14 to the main surface of a semiconductor substrate 8, having an opening part 3 through the main surface and making a fluid to be treated pass through there, an MEMS (microelectro mechanical system) 6 in the cavity 14, an electrode 7 formed on the main surface of the semiconductor substrate 8 and connected to the MEMS 6, an insulation substrate 1 arranged so that one side of the main surface faces the main surface of the semiconductor substrate 8, a second flow passage 15 formed in the inside of the insulation substrate 1, of which one side opening end 2 is formed in one side of the main surface of the insulation substrate 1 so as to face the opening part 3 and of which the other side opening 9 is formed on the other main surface or the side surface of the insulation substrate 1, and a connecting material 11 making the first flow passage communicate with the second flow passage by tightly surrounding a gap between the opening part 12 of the first flow passage 13 and the other side opening part 2 of the second flow passage 15 and connecting both the flow passages. COPYRIGHT: (C)2006,JPO&NCIPI
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