| 摘要 |
PROBLEM TO BE SOLVED: To provide a two-fluid jetting nozzle apparatus which is capable of enhancing impulse force imparted to a substrate without atomizing a mixture fluid. SOLUTION: The two-fluid jetting nozzle apparatus has a nozzle tip 7 of which the jetting aperture to jet a pressurized liquid and a gas in a mixture state is openly formed at the forefront face. In the nozzle tip, a first jetting aperture 21 and a second jetting aperture 22 which are inclined in different angles are formed symmetrically and in series to the diameter direction around the center of the axis of the nozzle tip. COPYRIGHT: (C)2006,JPO&NCIPI
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