发明名称 |
LOW EJECTION ENERGY MICRO-FLUID EJECTION HEADS |
摘要 |
<p>A micro-fluid ejection device structure and method therefor having improved low energy design. The devices includes a semiconductor substrate and an insulating layer deposited on the semiconductor substrate. A plurality of heater resistors are formed on the insulating layer from a resistive layer selected from the group consisting of TaAI, Ta2N, TaAI(O,N), TaA1Si, Ti(N,O), WSi(O,N), TaA1N, and TaAI/TaA1N. A sacrificial layer selected from an oxidizable metal and having a thickness ranging from about 500 to about 5000 Angstroms is deposited on the plurality of heater resistors. Electrodes are formed on the sacrificial layer from a first metal conductive layer to provide anode and cathode connections to the plurality of heater resistors. The sacrificial layer is oxidized in a plasma oxidation process to provide a fluid contact layer on the plurality of heater resistors.</p> |
申请公布号 |
WO2006026333(A2) |
申请公布日期 |
2006.03.09 |
申请号 |
WO2005US30198 |
申请日期 |
2005.08.25 |
申请人 |
LEXMARK INTERNATIONAL, INC |
发明人 |
ANDERSON, FRANK, E.;BELL, BYRON, V.;CORNELL, ROBERT, W.;GUAN, YIMIN |
分类号 |
B41J2/05 |
主分类号 |
B41J2/05 |
代理机构 |
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地址 |
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