| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a fixing apparatus which can maintain uniformly the angle formed by two reflecting mirrors even if a strain by a thermal deformation, etc. is applied to a fixing member for fixing the two reflecting mirrors and to provide a stage device, an exposure device and a method of manufacturing the device. <P>SOLUTION: The fixing apparatus 100 fixes two long reflecting mirrors 61 and 62 to a predetermined member, and includes a structure 101 for holding the two reflecting mirrors 61 and 62 in a predetermined positional relation, and first fixing units 103 and 104 and a second fixing unit 105 formed integrally with the structure 101 and fixed to the predetermined member. The first fixing units 103 and 104 are coupled to the structure 101 through an elastic unit 108. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
